Details
- Application number :
- 49361
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Plasma chamber
- Inventor :
- Muller, Claus
;
Moser, Eva Maria
- Agent name :
-
- Address for service :
-
- Filing date :
- 13 March 1996
- Associated companies :
-
- Applicant name :
- Eidgenossische Materialprufungs- und Forschungsanstalt EMPA
- Applicant address :
-
- Old name :
-
- Original Source :
- Go