Details
- Application number :
- 2002335687
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Chamber shields for a plasma chamber
- Inventor :
- Good, Brian James
- Agent name :
-
- Address for service :
-
- Filing date :
- 28 August 2002
- Associated companies :
-
- Applicant name :
- HYUNDAI SEMICONDUCTOR AMERICA, INC.
- Applicant address :
- 1830 Willow Creek Circle, Eugene, OR 97402
- Old name :
-
- Original Source :
- Go