Details
- Application number :
- 2003284723
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Plasma etching chamber and plasma etching system using same
- Inventor :
- Lim, Dong-Soo
- Agent name :
-
- Address for service :
-
- Filing date :
- 18 November 2003
- Associated companies :
-
- Applicant name :
- SOSUL CO., LTD.
- Applicant address :
- 540-3, Banwol-ri, Taean-eup, 445-973 Hwaseong-si, Kyungki-do
- Old name :
-
- Original Source :
- Go