Photoresists and processes for microlithography
A Standard patent application filed on 26 October 1999 credited to Schadt, Frank Leonard III ; Periyasamy, Mookkan ; Fryd, Michael

Details

Application number :
12332  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Photoresists and processes for microlithography  
Inventor :
Schadt, Frank Leonard III ; Periyasamy, Mookkan ; Fryd, Michael  
Agent name :
 
Address for service :
 
Filing date :
26 October 1999  
Associated companies :
 
Applicant name :
E.I. Du Pont De Nemours and Company  
Applicant address :
 
Old name :
 
Original Source :
Go  

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