Method and apparatus for producing silicon carbide single crystal
A Standard patent application filed on 11 September 1998 credited to Nagato, Nobuyuki
;
Komaki, Kunio
;
Nishino, Shigehiro
;
Oyanagi, Naoki
;
Yamamoto, Isamu
Details
Application number :
90034
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus for producing silicon carbide single crystal