Silicon carbide single crystal and method and apparatus for producing the same
A Standard patent application filed on 18 September 2003 credited to Takagi, Atsushi
;
Sakaguchi, Yasuyuki
;
Oyanagi, Naoki
Details
Application number :
2003272882
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Silicon carbide single crystal and method and apparatus for producing the same