Silicon carbide single crystal, and method and apparatus for producing the same
A Standard patent application filed on 21 December 2001 credited to Maruyama, Takayuki
;
Endo, Shigeki
Details
Application number :
2002216390
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Silicon carbide single crystal, and method and apparatus for producing the same