Details
- Application number :
- 2003223189
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Critical dimension control using full phase and trim masks
- Inventor :
- Pierrat, Christophe
- Agent name :
-
- Address for service :
-
- Filing date :
- 25 February 2003
- Associated companies :
-
- Applicant name :
- NUMERICAL TECHNOLOGIES, INC.
- Applicant address :
- 70 West Plumeria Drive, San Jose, CA 95134
- Old name :
-
- Original Source :
- Go