Self-aligned fabrication technique for tri-tone attenuated phase-shifting masks
A Standard patent application filed on 26 February 2002 credited to Pierrat, Christophe

Details

Application number :

2002309494  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Self-aligned fabrication technique for tri-tone attenuated phase-shifting masks  

Inventor :

Pierrat, Christophe  

Agent name :

 

Address for service :

 

Filing date :

26 February 2002  

Associated companies :

 

Applicant name :

NUMERICAL TECHNOLOGIES, INC.  

Applicant address :

70 West Plumeria Drive, San Jose, CA 95134  

Old name :

 

Original Source :

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