Structure and method of correcting proximity effects in a tri-tone attenuated phase-shifting mask
A Standard patent application filed on 30 November 2001 credited to Zhang, You-Ping ; Pierrat, Christophe

Details

Application number :

2002230726  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Structure and method of correcting proximity effects in a tri-tone attenuated phase-shifting mask  

Inventor :

Zhang, You-Ping ; Pierrat, Christophe  

Agent name :

 

Address for service :

 

Filing date :

30 November 2001  

Associated companies :

 

Applicant name :

Numerical Technologies, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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