Organic anti-reflective coating compositions for advanced microlithography
A Standard patent application filed on 13 December 2002 credited to Deshpande, Shreeram V.

Details

Application number :
2002361686  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Organic anti-reflective coating compositions for advanced microlithography  
Inventor :
Deshpande, Shreeram V.  
Agent name :
 
Address for service :
 
Filing date :
13 December 2002  
Associated companies :
 
Applicant name :
BREWER SCIENCE, INC.  
Applicant address :
2401 Brewer Drive, Rolla, MO 65401  
Old name :
 
Original Source :
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Same Inventor