Anti-reflective coatings and dual damascene fill compositions comprising styrene-allyl alcohol copolymers
A Standard patent application filed on 13 May 2003 credited to Xu, Gu
;
Meador, Jimmy D.
;
Deshpande, Shreeram V.
;
Bhave, Mander R.
;
Nowak, Kelly A.
Details
Application number :
2003300771
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Anti-reflective coatings and dual damascene fill compositions comprising styrene-allyl alcohol copolymers
Inventor :
Xu, Gu
;
Meador, Jimmy D.
;
Deshpande, Shreeram V.
;
Bhave, Mander R.
;
Nowak, Kelly A.