Anti-reflective coating composition with improved spin bowl compatibility
A Standard patent application filed on 15 April 2002 credited to Meador, Jim D. ; Nowak, Kelly A. ; Bhave, Mandar ; Shao, Xie ; Deshpande, Shreeram V. ; Krishnamurthy, Vandana ; Fowler, Michelle

Details

Application number :

2002338648  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Anti-reflective coating composition with improved spin bowl compatibility  

Inventor :

Meador, Jim D. ; Nowak, Kelly A. ; Bhave, Mandar ; Shao, Xie ; Deshpande, Shreeram V. ; Krishnamurthy, Vandana ; Fowler, Michelle  

Agent name :

 

Address for service :

 

Filing date :

15 April 2002  

Associated companies :

 

Applicant name :

BREWER SCIENCE, INC.  

Applicant address :

2401 Brewer Drive, Rolla, MO 65401-9926  

Old name :

 

Original Source :

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