Details
- Application number :
- 2002302554
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method and device for depositing layers
- Inventor :
- Heuken, Michael
- Agent name :
-
- Address for service :
-
- Filing date :
- 22 April 2002
- Associated companies :
-
- Applicant name :
- AIXTRON AG
- Applicant address :
- Kackertstrasse 15-17, 52072 Aachen
- Old name :
-
- Original Source :
- Go
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