Method and device for monitoring a cvd process
A Standard patent application filed on 02 October 2002 credited to Schmitt, Jurgen ; Pfeil, Michael ; Heuken, Michael ; Bode, Matthias

Details

Application number :

2002362847  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and device for monitoring a cvd process  

Inventor :

Schmitt, Jurgen ; Pfeil, Michael ; Heuken, Michael ; Bode, Matthias  

Agent name :

 

Address for service :

 

Filing date :

02 October 2002  

Associated companies :

 

Applicant name :

AIXTRON AG  

Applicant address :

Kackertstrasse 15-17, 52072 Aachen  

Old name :

 

Original Source :

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