Method for coating a substrate and device for carrying out the method
A Standard patent application filed on 19 March 2003 credited to Heuken, Michael ; Jurgensen, Holger

Details

Application number :

2003215669  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method for coating a substrate and device for carrying out the method  

Inventor :

Heuken, Michael ; Jurgensen, Holger  

Agent name :

 

Address for service :

 

Filing date :

19 March 2003  

Associated companies :

 

Applicant name :

AIXTRON AG  

Applicant address :

Kackertstrasse 15-17, 52072 Aachen  

Old name :

 

Original Source :

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