Method and apparatus for electrodeposition or etching of uniform film with minimal edge exclusion on substrate
A Standard patent application filed on 02 November 2001 credited to Basol, Bulent M.
;
Talieh, Homayoun
;
Uzoh, Cyprian
Details
Application number :
2002246910
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus for electrodeposition or etching of uniform film with minimal edge exclusion on substrate
Inventor :
Basol, Bulent M.
;
Talieh, Homayoun
;
Uzoh, Cyprian