Electrochemical mechanical processing with advancible sweeper
A Standard patent application filed on 04 November 2002 credited to Basol, Bulent M.
;
Talieh, Homayoun
;
Yakupoglu, Halit N.
;
Uzoh, Cyprian E.
Details
Application number :
2002363479
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Electrochemical mechanical processing with advancible sweeper
Inventor :
Basol, Bulent M.
;
Talieh, Homayoun
;
Yakupoglu, Halit N.
;
Uzoh, Cyprian E.