Details
- Application number :
- 2002214560
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Anode with porous insulating layer for discharge lasers
- Inventor :
- Morton, Richard G.
- Agent name :
-
- Address for service :
-
- Filing date :
- 08 October 2001
- Associated companies :
-
- Applicant name :
- Cymer, Inc.
- Applicant address :
-
- Old name :
-
- Original Source :
- Go