Gas discharge laser electrode with reduced sensitivity to adverse boundary layereffects

Application number :: 2001276818
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Gas discharge laser electrode with reduced sensitivity to adverse boundary layereffects
Inventor :: Morton, Richard G. ; Hueber, Jean-Marc
Agent name :
Address for service :
Filing date :: 24 April 2001
Associated companies :
Applicant name :: Cymer, Inc.
Applicant address :
Old name :
Original Source :: Go

Gas discharge laser electrode with reduced sensitivity to adverse boundary layereffects A Standard patent application filed on 24 April 2001 credited to Morton, Richard G. ; Hueber, Jean-Marc