Gas discharge laser long life electrodes
A Standard patent application filed on 24 April 2001 credited to Fleurov Vladimir, B. ; Gaidarenko, Dmitri V. ; Onkels, Eckehard D. ; Fomenkov, Igor V ; Winnick, Ross H. ; Du'Lyea, Michael ; Cates, Michael C. ; Morton, Richard G. ; Shannon, Robert A. ; Hueber, Jean-Marc

Details

Application number :

2001262949  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Gas discharge laser long life electrodes  

Inventor :

Fleurov Vladimir, B. ; Gaidarenko, Dmitri V. ; Onkels, Eckehard D. ; Fomenkov, Igor V ; Winnick, Ross H. ; Du'Lyea, Michael ; Cates, Michael C. ; Morton, Richard G. ; Shannon, Robert A. ; Hueber, Jean-Marc  

Agent name :

 

Address for service :

 

Filing date :

24 April 2001  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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