Gas discharge laser with blade-dielectric electrode
A Standard patent application filed on 20 April 2001 credited to Hueber, Jean-Marc ; Cates, Michael C. ; Winnick, Ross H. ; Morton, Richard G. ; Ujazdowski, Richard C.

Details

Application number :

2001261037  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Gas discharge laser with blade-dielectric electrode  

Inventor :

Hueber, Jean-Marc ; Cates, Michael C. ; Winnick, Ross H. ; Morton, Richard G. ; Ujazdowski, Richard C.  

Agent name :

 

Address for service :

 

Filing date :

20 April 2001  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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