Discharge laser having electrodes with sputter cavities and discharge peaks
A Standard patent application filed on 27 April 2001 credited to Onkels, Eckehard D. ; Bor, Zsolt ; Morton, Richard G.

Details

Application number :

2001276820  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Discharge laser having electrodes with sputter cavities and discharge peaks  

Inventor :

Onkels, Eckehard D. ; Bor, Zsolt ; Morton, Richard G.  

Agent name :

 

Address for service :

 

Filing date :

27 April 2001  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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