Improved sample inspection system
A Standard patent application filed on 18 September 1998 credited to Vaez-Iravani, Mehdi ; Zhao, Guoheng ; Stokowski, Stanley

Details

Application number :

94000  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Improved sample inspection system  

Inventor :

Vaez-Iravani, Mehdi ; Zhao, Guoheng ; Stokowski, Stanley  

Agent name :

 

Address for service :

 

Filing date :

18 September 1998  

Associated companies :

 

Applicant name :

Kla-Tencor Corporation  

Applicant address :

 

Old name :

 

Original Source :

Go  

Same Inventor

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