System for detecting anomalies and/or features of a surface
A Standard patent application filed on 28 July 1998 credited to Zhao, Guoheng ; Vaez-Iravani, Mehdi ; Stokowski, Stanley

Details

Application number :
87657  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
System for detecting anomalies and/or features of a surface  
Inventor :
Zhao, Guoheng ; Vaez-Iravani, Mehdi ; Stokowski, Stanley  
Agent name :
 
Address for service :
 
Filing date :
28 July 1998  
Associated companies :
 
Applicant name :
Kla-Tencor Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor