Optical inspection module and method for detecting particles and defects on substrates in integrated process tools
A Standard patent application filed on 30 March 1998 credited to Rao, Nagaraja P. ; Kinney, Patrick D.

Details

Application number :

69429  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Optical inspection module and method for detecting particles and defects on substrates in integrated process tools  

Inventor :

Rao, Nagaraja P. ; Kinney, Patrick D.  

Agent name :

 

Address for service :

 

Filing date :

30 March 1998  

Associated companies :

 

Applicant name :

Microtherm, LLC  

Applicant address :

 

Old name :

 

Original Source :

Go  

Same Inventor

• Optical method and apparatus for inspecting large area planar objects