Optical method and apparatus for inspecting large area planar objects
A Standard patent application filed on 14 November 2001 credited to Kinney, Patrick D. ; Rao, Nagaraja P.

Details

Application number :
2002219847  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Optical method and apparatus for inspecting large area planar objects  
Inventor :
Kinney, Patrick D. ; Rao, Nagaraja P.  
Agent name :
 
Address for service :
 
Filing date :
14 November 2001  
Associated companies :
 
Applicant name :
Real Time Metrology, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor