Substrate transport apparatus with dual substrate holders
A Standard patent application filed on 18 October 1996 credited to Hofmeister, Christopher A. ; Davis, James C. Jr.

Details

Application number :

75175  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Substrate transport apparatus with dual substrate holders  

Inventor :

Hofmeister, Christopher A. ; Davis, James C. Jr.  

Agent name :

 

Address for service :

 

Filing date :

18 October 1996  

Associated companies :

 

Applicant name :

Brooks Automation, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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Same Inventor

• Substrate transport apparatus with double substrate holders