Substrate transport apparatus with double substrate holders
A Standard patent application filed on 13 January 1997 credited to Muka, Richard S. ; Hofmeister, Christopher A. ; Davis, James C. Jr.

Details

Application number :

15783  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Substrate transport apparatus with double substrate holders  

Inventor :

Muka, Richard S. ; Hofmeister, Christopher A. ; Davis, James C. Jr.  

Agent name :

 

Address for service :

 

Filing date :

13 January 1997  

Associated companies :

 

Applicant name :

Brooks Automation, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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