A method and apparatus for measuring the surface temperature of a semiconductor
A Standard patent application filed on 23 May 1994 credited to Nishiguchi, Masanori
;
Miki, Atsushi
Details
Application number :
63240
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
A method and apparatus for measuring the surface temperature of a semiconductor
Inventor :
Nishiguchi, Masanori
;
Miki, Atsushi
Agent name :
Davies Collison Cave
Address for service :
Level 15 1 Nicholson Street MELBOURNE VIC 3000
Filing date :
23 May 1994
Associated companies :
Applicant name :
Sumitomo Electric Industries, Ltd.
Applicant address :
5-33 Kitahama 4-chome Chuo-ku Osaka-shi Osaka-fu Japan