Details
- Application number :
- 67316
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Polishing compound for chemimechanical polishing and polishing method
- Inventor :
- Uchida, Takeshi
;
Kamigata, Yasuo
;
Igarashi, Akiko
;
Kurata, Yasushi
;
Hoshino, Tetsuya
;
Terasaki, Hiroki
- Agent name :
-
- Address for service :
-
- Filing date :
- 25 August 2000
- Associated companies :
-
- Applicant name :
- Hitachi Chemical Company, Ltd.
- Applicant address :
-
- Old name :
-
- Original Source :
- Go