Details
- Application number :
- 59161
- Application type :
- Standard
- Application status :
- CEASED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method and apparatus for measuring temperature of substrate
- Inventor :
- Matsui, Yuichi
- Agent name :
- SPRUSON & FERGUSON
- Address for service :
- GPO Box 3898 SYDNEY NSW 2001
- Filing date :
- 24 June 1986
- Associated companies :
-
- Applicant name :
- Sumitomo Electric Industries, Ltd.
- Applicant address :
- No. 15, Kitahama 5-chome, Higashi-ku, Osaka-shi, Osaka, Japan
- Old name :
-
- Original Source :
- Go