Anti-reflective coating compositions for use with low k dielectric materials

Application number :: 2003294563
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Anti-reflective coating compositions for use with low k dielectric materials
Inventor :: Lamb, James E. ; Flaim, Tony D. ; Puligadda, Rama
Agent name :
Address for service :
Filing date :: 02 December 2003
Associated companies :
Applicant name :: BREWER SCIENCE, INC.
Applicant address :: 2401 Brewer Drive, Rolla, MO 65401
Old name :
Original Source :: Go

Anti-reflective coating compositions for use with low k dielectric materials A Standard patent application filed on 02 December 2003 credited to Lamb, James E. ; Flaim, Tony D. ; Puligadda, Rama