Anti-reflective coating compositions for use with low k dielectric materials
A Standard patent application filed on 14 May 2002 credited to Lamb, James E. Iii ; Puligadda, Rama ; Shao, Xie ; Flaim, Tony D. ; Huang, Runhui

Details

Application number :

2002259251  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Anti-reflective coating compositions for use with low k dielectric materials  

Inventor :

Lamb, James E. Iii ; Puligadda, Rama ; Shao, Xie ; Flaim, Tony D. ; Huang, Runhui  

Agent name :

 

Address for service :

 

Filing date :

14 May 2002  

Associated companies :

 

Applicant name :

BREWER SCIENCE, INC.  

Applicant address :

2401 Brewer Drive, Rolla, MO 65401-9926  

Old name :

 

Original Source :

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