System and method for maskless lithography using an array of sources and an array of focusing elements
A Standard patent application filed on 28 July 2003 credited to Gil, Dario ; Carter, David ; Menon, Rajesh ; Smith, Henry I. ; Barbastathis, George

Details

Application number :

2003274903  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

System and method for maskless lithography using an array of sources and an array of focusing elements  

Inventor :

Gil, Dario ; Carter, David ; Menon, Rajesh ; Smith, Henry I. ; Barbastathis, George  

Agent name :

 

Address for service :

 

Filing date :

28 July 2003  

Associated companies :

 

Applicant name :

MASSACHUSETTS INSTITUTE OF TECHNOLOGY  

Applicant address :

77 Massachusetts Avenue, Cambridge, MA 02139  

Old name :

 

Original Source :

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