Maskless lithography using an array of diffractive focusing elements
A Standard patent application filed on 22 July 2003 credited to Gil, Dario ; Carter, David ; Menon, Rajesh ; Smith, Henry I. ; Barbastathis, George

Details

Application number :
2003254085  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Maskless lithography using an array of diffractive focusing elements  
Inventor :
Gil, Dario ; Carter, David ; Menon, Rajesh ; Smith, Henry I. ; Barbastathis, George  
Agent name :
 
Address for service :
 
Filing date :
22 July 2003  
Associated companies :
 
Applicant name :
MASSACHUSSETS INSTITUTE OF TECHNOLOGY  
Applicant address :
77 Massachussets Avenue, Cambridge, MA 02139  
Old name :
 
Original Source :
Go  

Same Inventor