System and method for metal residue detection and mapping within a multi-step sequence
A Standard patent application filed on 10 September 2003 credited to Owczarz, Aleksander ; Hemker, David ; Gotkis, Yehiel ; Kistler, Rodney ; Bright, Nicolas

Details

Application number :
2003270533  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
System and method for metal residue detection and mapping within a multi-step sequence  
Inventor :
Owczarz, Aleksander ; Hemker, David ; Gotkis, Yehiel ; Kistler, Rodney ; Bright, Nicolas  
Agent name :
 
Address for service :
 
Filing date :
10 September 2003  
Associated companies :
 
Applicant name :
LAM RESEARCH CORPORATION  
Applicant address :
4650 Cushing Parkway, Fremont, CA 94538  
Old name :
 
Original Source :
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Same Inventor