Method and apparatus for applying differential removal rates to a surface of a substrate

Application number :: 2003253679
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Method and apparatus for applying differential removal rates to a surface of a substrate
Inventor :: Owczarz, Aleksander ; Hemker, David ; Gotkis, Yehiel ; Kistler, Rodney ; Bright, Nicolas J.
Agent name :
Address for service :
Filing date :: 23 June 2003
Associated companies :
Applicant name :: LAM RESEARCH CORPORATION
Applicant address :: 4650 Cushing Parkway, Fremont, CA 94538
Old name :
Original Source :: Go

Method and apparatus for applying differential removal rates to a surface of a substrate A Standard patent application filed on 23 June 2003 credited to Owczarz, Aleksander ; Hemker, David ; Gotkis, Yehiel ; Kistler, Rodney ; Bright, Nicolas J.