Method and apparatus for electroless deposition with temperature-controlled chuck
A Standard patent application filed on 26 August 2003 credited to Kolics, Artur ; Zhang, Jonathan Weiguo ; Ivanov, Igor C.

Details

Application number :
2003265687  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus for electroless deposition with temperature-controlled chuck  
Inventor :
Kolics, Artur ; Zhang, Jonathan Weiguo ; Ivanov, Igor C.  
Agent name :
 
Address for service :
 
Filing date :
26 August 2003  
Associated companies :
 
Applicant name :
BLUE29 CORPORATION  
Applicant address :
1252 Orleans Drive, Sunnyvale, CA 94089  
Old name :
 
Original Source :
Go  

Same Inventor