Temperature-controlled substrate holder
A Standard patent application filed on 26 August 2003 credited to Kolics, Artur
;
Zhang, Jonathan Weiguo
;
Ivanov, Igor C.
Details
Application number :
2003262881
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Temperature-controlled substrate holder
Inventor :
Kolics, Artur
;
Zhang, Jonathan Weiguo
;
Ivanov, Igor C.