Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition

Application number :: 2003223582
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition
Inventor :: Shih, Wu-Sheng ; Sabnis, Ram W.
Agent name :
Address for service :
Filing date :: 11 April 2003
Associated companies :
Applicant name :: BREWER SCIENCE, INC.
Applicant address :: 2401 Brewer Drive, Rolla, MO 65401
Old name :
Original Source :: Go

Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition A Standard patent application filed on 11 April 2003 credited to Shih, Wu-Sheng ; Sabnis, Ram W.