Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition

Application number :: 2001268412
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition
Inventor :: Sabnis, Ram ; Guerrero, Douglas J.
Agent name :
Address for service :
Filing date :: 12 June 2001
Associated companies :
Applicant name :: BREWER SCIENCE, INC.
Applicant address :: 2401 Brewer Drive, Rolla, MO 65401-9926
Old name :
Original Source :: Go

Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition A Standard patent application filed on 12 June 2001 credited to Sabnis, Ram ; Guerrero, Douglas J.