Details
- Application number :
- 2003209651
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method and system for overlay measurement
- Inventor :
- Finarov, Moshe
;
Scheiner, David
- Agent name :
-
- Address for service :
-
- Filing date :
- 06 March 2003
- Associated companies :
-
- Applicant name :
- NOVA MEASURING INSTRUMENTS LTD.
- Applicant address :
- Weizmann Science Park, P.O.B. 266, 76100 Rehovoth
- Old name :
-
- Original Source :
- Go