Apparatus and method of exposing a semiconductor device having a curved surface to light
A Standard patent application filed on 09 January 2003 credited to Yoshinaga, Junichi
Details
Application number :
2003209190
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Apparatus and method of exposing a semiconductor device having a curved surface to light
Inventor :
Yoshinaga, Junichi
Agent name :
Address for service :
Filing date :
09 January 2003
Associated companies :
Applicant name :
YAMATAKE CORPORATION
Applicant address :
12-19, Shibuya 2-chome, Shibuya-ku, Tokyo 150-8316