Apparatus and method of exposing light to a semiconductor device having a curved surface

Application number :: 2003207488
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Apparatus and method of exposing light to a semiconductor device having a curved surface
Inventor :: Satoh, Ichitaroh ; Takeda, Nobuo ; Nishimoto, Ikuo
Agent name :
Address for service :
Filing date :: 09 January 2003
Associated companies :
Applicant name :: YAMATAKE CORPORATION
Applicant address :: 12-19, Shibuya 2-chome, Shibuya-ku, Tokyo 150-8316
Old name :
Original Source :: Go

Apparatus and method of exposing light to a semiconductor device having a curved surface A Standard patent application filed on 09 January 2003 credited to Satoh, Ichitaroh ; Takeda, Nobuo ; Nishimoto, Ikuo