Details
- Application number :
- 2002354693
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Cvd system comprising a thermally differentiated substrate support
- Inventor :
- Kappeler, Johannes
- Agent name :
-
- Address for service :
-
- Filing date :
- 22 April 2002
- Associated companies :
-
- Applicant name :
- AIXTRON AG
- Applicant address :
- Kackertstrasse 15-17, 52072 Aachen
- Old name :
-
- Original Source :
- Go