Method and device for depositing especially crystalline layers onto especially crystalline substrates
A Standard patent application filed on 27 September 2002 credited to Franken, Walter ; Kappeler, Johannes

Details

Application number :

2002347033  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and device for depositing especially crystalline layers onto especially crystalline substrates  

Inventor :

Franken, Walter ; Kappeler, Johannes  

Agent name :

 

Address for service :

 

Filing date :

27 September 2002  

Associated companies :

 

Applicant name :

AIXTRON AG  

Applicant address :

Kackertstrasse 15-17, 52072 Aachen  

Old name :

 

Original Source :

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Same Inventor

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