Substrate transport apparatus with multiple independent end effectors
A Standard patent application filed on 15 July 2002 credited to Gilchrist, Ulysses

Details

Application number :

2002327249  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Substrate transport apparatus with multiple independent end effectors  

Inventor :

Gilchrist, Ulysses  

Agent name :

 

Address for service :

 

Filing date :

15 July 2002  

Associated companies :

 

Applicant name :

BROOKS AUTOMATION, INC.  

Applicant address :

15 Elizabeth Drive, Chelmsford, MA 01824  

Old name :

 

Original Source :

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