Substrate loading and unloading station with buffer
A Standard patent application filed on 22 July 2003 credited to Beaulieu, David R. ; Gilchrist, Ulysses ; Van Der Meulen, Peter F.

Details

Application number :

2003254103  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Substrate loading and unloading station with buffer  

Inventor :

Beaulieu, David R. ; Gilchrist, Ulysses ; Van Der Meulen, Peter F.  

Agent name :

 

Address for service :

 

Filing date :

22 July 2003  

Associated companies :

 

Applicant name :

BROOKS AUTOMATION, INC.  

Applicant address :

15 Elizabeth Drive, Chelmsford, MA 01824  

Old name :

 

Original Source :

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