Details
- Application number :
- 2002256900
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method for cleaning surface of substrate
- Inventor :
- Morinaga, Hitoshi
;
Mochizuki, Hideaki
- Agent name :
-
- Address for service :
-
- Filing date :
- 20 May 2002
- Associated companies :
-
- Applicant name :
- MITSUBISHI CHEMICAL CORPORATION
- Applicant address :
- 5-2, Marunouchi 2-chome, Chiyoda-ku, Tokyo 100-0005
- Old name :
-
- Original Source :
- Go